In-situ measurement of mirror deformation using dual Fabry-Perot cavities for optical pressure standard
In-situ measurement of mirror deformation using dual Fabry-Perot cavities for optical pressure standard
复制标题
使用双法布里-珀罗腔进行光学压力标准镜变形的原位测量
DOI：
10.1016/j.measurement.2020.108496
复制
发表时间：
2021
期刊：
影响因子：
5.6
通讯作者：
Kobata Tokihiko
中科院分区：
文献类型：
--
作者：
Takei Yoshinori;Telada Souichi;Yoshida Hajime;Arai Kenta;Bitou Youichi;Kobata Tokihiko
一些国家计量机构正在研制一种利用法布里-帕姆罗（FP）腔的光学压力测量系统，作为未来的压力标准。这些研究努力的挑战之一是FP腔的变形。本研究的目的是通过模拟和实验两种方法来评估使用不同材料的间隔器和反射镜构建的FP腔中的反射镜变形。实验结果与有限元模拟结果基本一致。采用双腔法可以确定镜面变形量，而不需要使用材料的标称值，也不依赖于传统的压力标准。研究结果表明，在镜面变形较大或精度要求较高的情况下，应采用双腔法和有限元模拟。该研究结果有助于开发使用FP腔的初级压力标准。
An optical pressure measurement system using Fabry–Pérot (FP) cavities are being developed in several national metrology institutes as a future pressure standard. One of the challenges in these research endeavors is the deformation of the FP cavity. The purpose of this study is to evaluate mirror deformation in FP cavities constructed using different materials for the spacer and mirrors, both by simulation and experiment. Experimental and finite element method (FEM) simulation results are in broad agreement. The mirror deformation amount can be determined using the dual cavity method without using the nominal values of material and without depending on conventional pressure standards. Our results suggest that the dual cavity method as well as FEM simulation should be adopted for situations in which the mirror deformation is large and/or high accuracy is required. The results of this study contribute to the development of the primary pressure standard using FP cavities.