Self-referenced spectral interferometry for simultaneous measurements of thickness and refractive index.
Self-referenced spectral interferometry for simultaneous measurements of thickness and refractive index.
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自参考光谱干涉仪可同时测量厚度和折射率。
DOI：
10.1364/ao.48.002461
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发表时间：
2009
期刊：
影响因子：
1.9
通讯作者：
B. Lee
中科院分区：
文献类型：
--
作者：
Jihoon Na;H. Choi;EunSeo Choi;Changsu Lee;B. Lee
提出了一种基于自参考谱域光纤干涉法同时测量样品厚度和群折射率的方法。通过去除扫描部分并使用基于光纤的配置，可以显著改善系统的复杂性和稳定性。为了使系统漂移最小化，我们利用了来自两个臂的光纤端的信号。在自参考配置中实现，我们可以将测量精度提高到小数位。用1.555 mm厚的熔融石英板进行实验测量。在814 nm处，厚度测量为1.5546 +/- 0.0002 mm，同时，组指数获得为1.4627 +/- 0.0002。
We present a method for simultaneously measuring the thickness and the group refractive index of a specimen using self-referenced spectral-domain fiber-based interferometry. By removing the scanning part and using the fiber-based configuration, the system complexity and stability could be significantly improved. To minimize the system drift, we utilized the signals originated from the fiber ends of both arms. Implementing in a self-referenced configuration, we could improve the measurement accuracy down to a decimal place. Experimental measurements were made with a 1.555 mm thick fused silica plate. At 814 nm the thickness was measured as 1.5546 +/- 0.0002 mm, and at the same time, the group index was obtained as 1.4627 +/- 0.0002.