Dynamic modeling and scaling of nanostructure formation in the lithographically induced self-assembly and self-construction
Dynamic modeling and scaling of nanostructure formation in the lithographically induced self-assembly and self-construction
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DOI：
10.1063/1.1572963
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发表时间：
2003-05
影响因子：
4
通讯作者：
Lin Wu;S. Chou
中科院分区：
文献类型：
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作者：
Lin Wu;S. Chou
我们对光刻诱导的聚合物薄膜自组装和自构建过程中纳米结构的动态形成过程及尺度进行了数值研究。我们的研究表明，自组装柱体的周期取决于表面张力和静电力之间的比值。聚合物的粘度对最终柱体形状没有影响。当模具的特征宽度与系统最不稳定扰动波长相当或更小时，最初自组装的柱体将合并形成一个自构建的台面。
We numerically studied the dynamical formation process and the scaling of the nanostructures in the lithographically induced self-assembly and self-construction of thin polymer films. Our studies show that the period of the self-assembled pillars depends on the ratio between the surface tension force and the electrostatic force. The viscosity of the polymer has no effect on the final pillar shape. When the feature width of the mold is comparable to or smaller than the most unstable disturbance wavelength of the system, the initially self-assembled pillars will merge to form a self-constructed mesa.