Refractive Microlens Fabrication by Ink-Jet Process

Refractive Microlens Fabrication by Ink-Jet Process
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DOI:
10.22028/d291-24257
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发表时间:
1998
影响因子:
2.5
通讯作者:
S. Biehl;R. Danzebrink;P. Oliveira;M. Aegerter
S. Biehl;R. Danzebrink;P. Oliveira;M. Aegerter
中科院分区:
材料科学3区
文献类型:
--
作者:
S. Biehl;R. Danzebrink;P. Oliveira;M. Aegerter

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利用商用按需喷墨打印系统在玻璃衬底上制备了有机-无机混合材料微透镜,喷嘴直径为50μm,由压电器件驱动。沉积后的液滴在紫外光照射下聚合。粘度、溶剂挥发、液滴-基片润湿条件以及液滴和基片温度是控制可复制透镜形状生产的主要参数。用原子力显微镜和轮廓术对透镜的形状和表面粗糙度进行了表征。用光学显微镜和分光光度技术测定了它们的光学性质。该印刷技术可以生产直径从50到300μm的平凸球面微透镜,焦距从70μm到3 mm,f数低至0.6。
Microlenses made of hybrid organic-inorganic materials have been fabricated on glass substrates using a commercial drop-on-demand ink-jet printing system with a 50 μm diameter nozzle driven by a piezoelectric device. After deposition the drops have been polymerized by UV light irradiation. Viscosity, solvent evaporation, drop-substrate wetting condition and drop and substrate temperatures are the main parameters which govern the production of reproducible lens shapes. The shape and surface roughness of the lenses have been characterized by atomic force microscopy and profilometry. Their optical properties have been determined by light microscopy and spectrophotometric techniques. The printing technique can produce plano-convex spherical microlenses with diameters varying from 50 to 300 μm, focal lengths from 70 μm to 3 mm and f-numbers as low as 0.6.