Electrically tunable transmission-type beam deflector using liquid crystal with high angular resolution
Electrically tunable transmission-type beam deflector using liquid crystal with high angular resolution
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DOI：
10.1364/ao.57.005090
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发表时间：
2018-06-20
期刊：
影响因子：
1.9
通讯作者：
Lee, Hong-Seok
中科院分区：
文献类型：
--
作者：
Kim, Young;Won, Kanghee;Lee, Hong-Seok
具有高角分辨率的高效传输型光束偏转器已广泛用于各种应用。许多用途也需要连续可调的光束偏转器。广泛用于透明电极的氧化铟锡（ITO）被放置在上下玻璃基板上。与有源区域中的主光栅 ITO 图案相比，下基板上的 ITO 层通过接触掩模对准器进行图案化，以获得相对较宽的输入和输出焊盘。下基板上的这些输入和输出焊盘连接到每个驱动集成电路（IC），该IC具有360个通道以进行连续控制。开发了6μm的小像素间距光栅图案（电极宽度为3μm，间距为3μm），计算并测量了波长532nm下的最大衍射角为2.541度。通过使用高双折射液晶，将 2.5 μm 的最小单元间隙应用于全 2 pi 相位调制。还开发了用于连续光束转向的驱动模块并将其应用于光束偏转器系统。在大约2.541度的衍射角处观察到大约50.9％的衍射效率。 (c) 2018 美国光学学会
Highly efficient transmission-type beam deflectors that have high angular resolution have been widely used for various applications. Continuously tunable beam deflectors have also been needed for many purposes. An indium- tin-oxide (ITO), widely used for transparent electrodes, was placed on the upper and lower glass substrate. The ITO layer on the lower substrate was patterned by the contact mask aligner for relatively wide input and output pad compared to main grating ITO patterns in the active area. These input and output pads on the lower substrate are connected to each driving integrated circuit (IC), which has 360 channels for continuous control. A small pixel pitch of grating patterns of 6 mu m (the electrode width is 3 mu m with a 3 mu m spacing) was developed, and the maximum diffraction angle is calculated and measured at 2.541 degrees with a wavelength of 532 nm. A minimal cell gap of 2.5 mu m was applied for the full 2 pi phase modulation by using a high-birefringence liquid crystal. A driving module for continuous beam steering is also developed and applied to the beam deflector system. A diffraction efficiency of about 50.9% is observed at an angle of diffraction about 2.541 degrees. (c) 2018 Optical Society of America