Evaluation of megasonic cleaning processes
Evaluation of megasonic cleaning processes
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兆频超声波清洗工艺的评估
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
P. Mertens
中科院分区：
文献类型：
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作者：
F. Holsteyns;A. Riskin;G. Vereecke;A. Maes;P. Mertens
为了深入了解声波和水基清洁化学品的相互作用，开发了不同的监测工具，并将结果与颗粒去除测试进行了比较。第一工具被设计成捕获来自声场中产生的空化的声致发光。它将被证明，空化在颗粒去除中起着核心作用。不同的参数，如气体含量，功率和表面活性剂的存在下，研究了声致发光。第二种工具基于水听器，提供了清洗槽中声波功率分布的详细地图。提取了近场的衍射图和远场的衰减图，研究了气泡对声功率色散的影响。
To get an insight in the interaction of acoustic waves and an aqueous based cleaning chemistry, different monitoring tools were developed and the results compared to particle removal tests. A first tool is designed to capture sonoluminescence, coming from cavitation generated in the acoustic field. It will be shown that cavitation plays a central role in the particle removal. Different parameters as gas content, power and presence of surfactants are studied in relation to sonoluminescence. A second tool, based on a hydrophone, provides a detailed map of the power distribution of the acoustic waves in a cleaning tank. Diffraction patterns in the near field and attenuation profiles in the far field are extracted and the impact of bubbles to the dispersion of the acoustic power is studied.