III-nitride blue and ultraviolet photonic crystal light emitting diodes
III-nitride blue and ultraviolet photonic crystal light emitting diodes
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DOI：
10.1063/1.1644050
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发表时间：
2004-01-26
影响因子：
4
通讯作者：
Jiang, HX
中科院分区：
文献类型：
--
作者：
Oder, TN;Kim, KH;Jiang, HX
我们展示了在电流注入下使用光子晶体 (PC) 增强 III 族氮化物发光二极管 (LED) 的 460 nm 蓝色和 340 nm 紫外光功率输出的结果。使用电子束光刻和感应耦合等离子体干法刻蚀形成直径/周期为 300/700 nm 的 PC 三角形阵列。 300x300 mum(2) 未封装 LED 芯片在 20 mA 时的总功率显示，由于 PC 形成，蓝色和 UV LED 分别增加了 63% 和 95%。讨论了使用 PC 进一步增强光提取增强的可能方法。 (C) 2004 年美国物理研究所。
We present results on enhancement of 460 nm blue and 340 nm UV optical power output in III-nitride light emitting diodes (LEDs) using photonic crystals (PCs) under current injection. Triangular arrays of the PCs with diameter/periodicity of 300/700 nm were patterned using electron-beam lithography and inductively coupled plasma dry etching. The total power at 20 mA of 300x300 mum(2) unpackaged LED chips revealed an increase by 63% and 95% for the blue and UV LEDs, respectively, as a result of the PC formation. Possible ways for further improving enhancement of light extraction using PCs are discussed. (C) 2004 American Institute of Physics.