Photonic crystals in lithium niobate by combining focussed ion beam writing and ion‐beam enhanced etching
Photonic crystals in lithium niobate by combining focussed ion beam writing and ion‐beam enhanced etching
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DOI：
10.1002/pssa.201431328
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发表时间：
2014-10
期刊：
影响因子：
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通讯作者：
R. Geiss;S. Diziain;M. Steinert;F. Schrempel;E. Kley;A. Tünnermann;T. Pertsch
中科院分区：
文献类型：
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作者：
R. Geiss;S. Diziain;M. Steinert;F. Schrempel;E. Kley;A. Tünnermann;T. Pertsch
提出了通过聚焦离子束写入和离子束增强蚀刻在自悬浮的锂离子电池膜中实现光子晶体。讨论了镓污染的影响，并在实现L3光子晶体谐振器时考虑了镓污染的影响，L3光子晶体谐振器在交叉偏振谐振散射实验中显示出设计的线性光学响应。
The realization of photonic crystals in self‐suspended lithium niobate membranes by means of focussed ion beam writing and ion‐beam enhanced etching is presented. The influence of gallium contamination is discussed and considered in the realization of a L3 photonic crystal resonator that is showing the designed linear optical response in a cross‐polarization resonant scattering experiment.