Implementation of AFM tip-based nanoscratching process on single crystal copper: Study of material removal state
Implementation of AFM tip-based nanoscratching process on single crystal copper: Study of material removal state
复制标题
在单晶铜上实施基于 AFM 尖端的纳米划痕工艺：材料去除状态的研究
DOI：
10.1016/j.apsusc.2018.08.090
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发表时间：
2018
影响因子：
6.7
通讯作者：
Yang He
中科院分区：
文献类型：
--
作者：
Yongda Yan;Jiqang Wang;Yanquan Geng;Zhuo Fang;Yang He
材料去除状态是任何加工过程中的重要因素，与加工质量密切相关。在非旋转对称刀具切削过程中，划痕方向对材料去除状态有重要影响。在本研究中，材料去除模式和划痕方向之间的关系进行了研究，在单晶铜纳米划痕过程中使用原子力显微镜（AFM）针尖。考虑悬臂梁安装角度和堆积高度的影响，建立了加工单槽时加工深度与法向载荷的理论模型。实验结果表明，理论法向载荷模型更适合于材料在小堆积的恒定切屑形成中排出。此外，通过不同方向的划痕试验，得出临界切削夹角决定了切屑形成过程中材料是否被排出。在正向刮擦过程中，堆积高度也受切削夹角的影响;而在正向切削过程中，由侧刃和前刃形成的切削扫掠面之间的距离决定了堆积高度。最后，根据加工槽的质量选择最佳的加工方向，这可以用于潜在的应用。
The material removal state, which is closely related to machining quality, is an important factor in any machining process. During the machining using a non-rotational symmetric cutting tool, scratching direction manifests significant influence on the material removal state. In the present study, the relationship between material removal mode and scratching direction was investigated during the nanoscratching process on single crystal copper using an atomic force microscopy (AFM) tip. Considering the installation angle of the cantilever and the height of pile-up, a theoretical model was developed to relate machining depth with normal load for the machining of a single groove. Experimental results revealed that the theoretical normal load model was more suitable when materials were expelled in constant chip formation with small pile-ups. In addition, based on the scratching tests in different directions, the critical included cutting angle determined whether materials were expelled in chip formation or not. The height of pile-up was also influenced by the included cutting angle during the scratching in face-forward direction; however, during the machining in edge-forward direction, the distance between the cutting swept faces formed by the lateral and front edges determined the height of pile-up. Finally, an optimal machining direction is selected based on the quality of the machined grooves, which can be used in the potential application.