A dual axis gas gyroscope utilizing low-doped silicon thermistor
A dual axis gas gyroscope utilizing low-doped silicon thermistor
复制标题
采用低掺杂硅热敏电阻的双轴气体陀螺仪
DOI：
10.1109/memsys.2005.1454007
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
S. Sugiyama
中科院分区：
文献类型：
--
作者：
V. Dau;T. Shiozawa;D. Dao;H. Kumagai;S. Sugiyama
本文介绍了一种双轴半导体气体陀螺仪的设计、仿真和制作。该传感器由压电泵和微型热敏元件组成，封装在直径为14 mm、长度为25 mm的铝壳中。灵敏度模拟结果与实验数据吻合较好。该传感器可应用于船舶减摇与减摇系统。
This paper presents the design, simulation and fabrication of a dual axis semiconductor gas gyroscope. The sensor configuration consists of a piezoelectric pump and a micro thermal sensing element, packaged in an aluminum case with diameter and length of 14mm and 25mm, respectively. Good agreement between the sensitivity simulation results and the experimental data has been realized. This sensor is to be applied in ship anti-rolling and stabilization systems.