Electrothermally activated SU-8 microgripper for single cell manipulation in solution
Electrothermally activated SU-8 microgripper for single cell manipulation in solution
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DOI：
10.1109/jmems.2005.845445
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发表时间：
2005-08-01
影响因子：
2.7
通讯作者：
Lee, LP
中科院分区：
文献类型：
--
作者：
Chronis, N;Lee, LP
介绍了一种可在生理离子溶液中工作的SU-8微夹钳的研制。电热激活的聚合物夹持器由两个“热和冷臂”的致动器，在一个双掩模表面微加工工艺制造。与硅和金属相比，SU-8的热膨胀系数高（52 ppm/℃），允许在低电压（1 - 2 V）下以较小的平均温度升高（10 - 32 ℃）驱动微夹持器。聚合物微夹持器可用于操纵溶液中的单细胞和其他生物物种，具有最小的不期望的相互作用。
The development of a SU-8-based microgripper that can operate in physiological ionic solutions is presented. The electrothermally activated polymer gripper consists of two "hot-and-cold-arm" actuators that are fabricated in a two-mask surface micromachining process. The high thermal expansion coefficient of SU-8 (52 ppm/degrees C) compared to silicon and metals, allows the actuation of the microgripper with small average temperature elevations (10 - 32 degrees C) at low voltages (1-2 V). The polymer microgripper can be used for the manipulation of single cells and other biological species in solution with minimal undesired interactions.