Monolithically integrated laser/rear-facet monitor arrays with V-groove for passive optical fiber alignment
Monolithically integrated laser/rear-facet monitor arrays with V-groove for passive optical fiber alignment
复制标题
单片集成激光/背面监控阵列，带有用于无源光纤对准的 V 型槽
DOI：
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复制
发表时间：
1993
影响因子：
2.6
通讯作者：
J. Kaur
中科院分区：
文献类型：
--
作者：
M. Rothman;C. Shieh;A. Negri;J. Thompson;C. Armiento;R. Holmstrom;J. Kaur
首次提出了一种单片集成后端面监视器和光纤V型槽的InGaAsP/InP激光器。该集成器件结合了使用原位、多步骤、反应离子蚀刻工艺制造的蚀刻面激光器。集成的V型槽直接刻蚀到InP衬底中，旨在实现光纤与激光器有源区的被动对准。多模分裂光纤和单模光纤的被动耦合效率分别为18%和8%。后小平面显示器的响应度高达0.49 A/W。
An InGaAsP/InP laser monolithically integrated with a rear facet monitor and a fiber V-groove has been demonstrated for the first time. The integrated device incorporates an etched-facet laser fabricated using an in situ, multistep, reactive ion etch process. The integrated V-groove, which is etched directly into the InP substrate, is designed to enable passive alignment of an optical fiber to the active region of the laser. Passive coupling efficiencies of 18% and 8% have been obtained using cleaved multimode and single mode fibers, respectively. Responsivities of the rear facet monitor were as high as 0.49 A/W.<<ETX>>