Dynamic pull-in phenomenon in MEMS resonators
Dynamic pull-in phenomenon in MEMS resonators
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DOI：
10.1007/s11071-006-9079-z
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发表时间：
2007-04-01
影响因子：
5.6
通讯作者：
Abdel-Rahman, Eihab M.
中科院分区：
文献类型：
--
作者：
Nayfeh, Ali H.;Younis, Mohammad I.;Abdel-Rahman, Eihab M.
我们研究了微机电（MEMS）谐振器中的吸合不稳定性，发现存在交流负载时的吸合现象不同于纯直流负载下的吸合现象。我们分析这种现象，被称为动态拉入，并制定安全标准的MEMS谐振传感器和滤波器的设计激发其自然频率附近。我们也利用这一现象，设计了一个低电压的MEMS射频开关驱动与组合的DC和AC负载。新开关使用的电压比传统使用的直流电压低得多。可以调节AC负载的频率或幅度以减少驱动电压和开关时间。这种新的驱动方法有可能解决RF MEMS开关的高驱动电压问题。
We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.