Fabrication of Cavity-Sealed Optical Interferometric Surface Stress Biosensor by thin Film Transfer Technique
Fabrication of Cavity-Sealed Optical Interferometric Surface Stress Biosensor by thin Film Transfer Technique
复制标题
薄膜转移技术制备腔体密封光学干涉表面应力生物传感器
DOI：
10.1109/transducers.2019.8808637
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Kazuhiro Takahashi
中科院分区：
文献类型：
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作者：
Toshiaki Takahashi;Yong-Joon Choi;Satoshi Maruyam;Miki Taki;Kazuaki Sawada;Kazuhiro Takahashi
我们开发了一种基于MEMS法布里-珀罗干涉仪、具有腔体密封结构的表面应力传感器，通过纳米厚的聚对二甲苯片的转移技术，实现高灵敏度的无标记生物传感。所提出的 MEMS 干涉仪可以测量由目标分子吸附引起的膜偏转作为光谱偏移。所提出的腔密封光学干涉仪可以防止膜背面的物理吸附和腔内的折射率漂移，从而提高灵敏度。我们成功地在10分钟内获得了77 nm的光谱位移以及与1 ng/ml浓度的抗原抗体反应相关的颜色变化，与传统传感器相比提高了16.7倍。
We developed a surface stress sensor based on a MEMS Fabry-Perot interferometer with cavity-sealed structure by transfer technique of nanometer-thick parylene sheet for highly sensitive label-free biosensing. The proposed MEMS interferometer can measure the membrane deflection caused by target molecule adsorption as the spectral shift. The proposed cavity-sealed optical interferometer can prevent physical adsorption to the backside of membrane and refractive index drift in the cavity, leading to improvement of sensitivity. We successfully obtained the spectral shift of 77 nm in 10 minutes with the color change associated with the antigen-antibody reaction with a concentration of 1 ng/ml, which improved by 16.7-fold compared with the conventional sensor.