Laser ablation mechanism of transparent dielectrics with picosecond laser pulses
Laser ablation mechanism of transparent dielectrics with picosecond laser pulses
复制标题
皮秒激光脉冲透明电介质激光烧蚀机理
DOI：
10.1117/12.976062
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发表时间：
2012
期刊：
影响因子：
--
通讯作者：
Wolfgang Schulz
中科院分区：
文献类型：
--
作者：
Mingying Sun;Urs Eppelt;Simone Russ;Claudia Hartmann;Christof Siebert;Jianqiang Zhu;Wolfgang Schulz
薄玻璃板（厚度<1 mm）在OLED和LCD显示器中具有很大的潜力。虽然传统的制造方法，如机械划线和断裂，导致边缘强度差，超短脉冲激光加工可能是一个有前途的解决方案，提供高质量的切割边缘。然而，激光精密玻璃切割遭受不必要的材料改性，甚至严重损坏（例如裂纹和碎片）。因此，有必要深入了解超短脉冲激光烧蚀透明陶瓷的机理，以弥补这些缺陷。本文研究了皮秒激光脉冲辐照透明陶瓷的烧蚀机理。利用包含多光子电离、雪崩电离和损耗项的自由电子密度速率方程分析了自由电子的超快动力学。给出了两种参数空间自由电子密度分布图，讨论了烧蚀阈值强度/注量与脉冲宽度的关系。提出了描述激光在透明介质中传输和能量沉积的激光烧蚀模型。基于我们的模型，模拟和实验已经进行了研究烧蚀动力学。模拟和实验结果显示出良好的一致性，为透明电介质激光加工的优化提供了巨大的潜力。研究了复合系数和电子碰撞时间对模型的影响。
Thin glass sheets (thickness <1 mm) have a great potential in OLED and LCD displays. While the conventional manufacturing methods, such as mechanical scribing and breaking, result in poor edge strength, ultra-short-pulsed laser processing could be a promising solution, offering high-quality cutting edges. However laser precision glass cutting suffers from unwanted material modification and even severe damage (e.g. cracks and chipping). Therefore it is essential to have a deep understanding of the ultra-short-pulsed laser ablation mechanism of transparent dielectrics in order to remedy those drawbacks. In this work, the ablation mechanism of transparent dielectrics irradiated by picosecond laser pulses has been studied. Ultrafast dynamics of free-electrons is analyzed using a rate equation for free-electron density including multi-photon ionization, avalanche ionization and loss terms. Two maps of free-electron density in parameter space are given to discuss the dependence of ablation threshold intensity/fluence on pulse duration. The laser ablation model describing laser beam propagation and energy deposition in transparent dielectrics is presented. Based on our model, simulations and experiments have been performed to study the ablation dynamics. Both simulation and experimental results show good agreement, offering great potential for optimization of laser processing in transparent dielectrics. The effects of recombination coefficient and electron-collision time on our model are investigated.
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影响因子：
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DOI：
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发表时间：
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期刊：
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影响因子：
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