Vibration Measurement of Ultrasonic Motor Using Stroboscopic Interferometry
Vibration Measurement of Ultrasonic Motor Using Stroboscopic Interferometry
复制标题
利用频闪干涉法测量超声波电机的振动
DOI：
10.1299/kikaic.62.2237
复制
发表时间：
1996
期刊：
影响因子：
--
通讯作者：
T. Eguchi
中科院分区：
文献类型：
--
作者：
K. Nakano;G. Nishizawa;S. Okuma;K. Hane;T. Eguchi
本文提出了一种频闪干涉法测量超声电机微小振动的方法。光学显微镜中的斐索干涉仪用于获得振动表面的频闪干涉图像。用条纹扫描法对测得的干涉图进行了分析。超声电机的定子在30 kHz的谐振频率下被激励。由于激光照射时间与样品的振动周期相比足够短，因此获得了具有高对比度的干涉图像。通过改变激光照射的延迟时间，获得了不同相位的表面振动。振动的分布是可视化的顺序。定子以3的振幅振动。7μm峰间距离，因此测量误差约为激光波长的1/20。该方法可用于超声电机的优化设计。
In this paper, we propose a stroboscopic interferometric method to measure small vibrations of an ultrasonic motor. The Fizeau interferometer in the optical microscope is used to obtain stroboscopic interference images of a vibrating surface. The measured interferograms are analyzed by the fringe scanning method. The stator of an ultrasonic motor is excited at a resonant frequency of 30 kHz. As the laser irradiation time is sufficiently short compared with the vibration period of the sample, interferometric images with a high contrast are obtained. By changing the delay time of the laser irradiation, vibrations of the surface at different phases are obtained. The distribution of the vibration is visualized sequentially. The stator is vibrated at an amplitude of 3. 7μm peak to peak, so the measurement error is evaluated to be 1/20 of the laser wavelength approximately. This method is useful for designing an optimal ultrasonic motor.