POLISHING USING ER SLURRY ON ONE-SIDED PATTERNED ELECTRODES
POLISHING USING ER SLURRY ON ONE-SIDED PATTERNED ELECTRODES
复制标题
DOI：
10.1142/s0217979205030761
复制
发表时间：
2005-04
影响因子：
1.7
通讯作者：
T. Kikuchi;J. Fujiwara;J. Furusho;A. Inoue
中科院分区：
文献类型：
--
作者：
T. Kikuchi;J. Fujiwara;J. Furusho;A. Inoue
由电流变液和磨料颗粒组成的电流变浆料可用于高效抛光或精加工。在这项研究中，我们提出了一个最终的过程与ER浆料和单面图案化电极。研究了电流变浆料的特性。并且，进行作为使用ER浆料的抛光的ER抛光。结果表明，电场的作用可以加速抛光过程。
ER slurry, which is composed of an ER fluid and abrasive grains, is available for efficient polishing or finishing. In this study, we propose a final process with the ER slurry and one-sided patterned electrodes. Characteristics of the ER slurry were investigated. And, ER polishing, which is a polishing using the ER slurry, was carried out. Results showed that the impression of the electric field can accelerate the polishing.