Development of DMD reflection-type CCD camera for phase analysis and shape measurement
Development of DMD reflection-type CCD camera for phase analysis and shape measurement
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DOI：
10.1117/12.647938
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发表时间：
2005-12
期刊：
影响因子：
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通讯作者：
S. Ri;Y. Matsunaga;M. Fujigaki;T. Matui;Y. Morimoto
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文献类型：
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作者：
S. Ri;Y. Matsunaga;M. Fujigaki;T. Matui;Y. Morimoto
DMD（数字微镜器件）是一种新型器件，在一个芯片中具有数十万个微镜。本文介绍了基于 DMD 技术的用于相位分析和形状测量的相机系统的开发成果，我们称之为“DMD 反射型 CCD 相机”或“DMD 相机”。 DMD 技术的结合可以精确控制到达相机成像探测器的强度。为了以高精度执行精确的像素到像素对应调整，我们使用莫尔技术。此外，我们还引入了高速可控DMD操作板，并改进了软件以高速控制每个DMD镜。因此，每个 DMD 镜都充当相应 CCD 像素的高速可控快门。此外，作为使用DMD相机的应用，我们通过“使用相关性的DMD型集成相移方法”进行了实验，该实验可以从DMD相机拍摄的一张图像中分析投影光栅的相位分布。显示了这些原理和动态条件下的实验结果。
DMD (Digital Micro-mirror Device) is a new device, which has hundreds of thousands of micro-mirrors in one chip. This paper presents results of the development of a camera system based on DMD technology for phase analysis and shape measurement that we call "DMD reflection-type CCD camera" or "DMD camera". Incorporation of DMD technology enables accurate control of the intensity reaching the imaging detector of a camera. In order to perform accurate pixel-to-pixel correspondence adjustment with high accuracy, we use a moire technique. In addition, we introduce a high-speed controllable DMD operation board and improve the software to control each DMD mirror with high-speed. As the results, each DMD mirror works as a high-speed controllable shutter for the corresponding CCD pixel. Furthermore, as an application using the DMD camera, we perform an experiment by "DMD-type integrated phase-shifting method using correlations," which can analyze the phase distributions of projected grating from one image taken by the DMD camera. These principles and experimental results in dynamic condition are shown.