On the origin of strain fluctuation in strained-Si grown on SiGe-on-insulator and SiGe virtual substrates
On the origin of strain fluctuation in strained-Si grown on SiGe-on-insulator and SiGe virtual substrates
复制标题
绝缘体上硅锗和硅锗虚拟衬底上生长的应变硅应变波动的起源
DOI:
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发表时间:
2004
期刊:
影响因子:
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通讯作者:
K.Kutsukake
中科院分区:
文献类型:
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作者:
N.Usami;K.Arimoto;K.Sawano;K.Kutsukake