Takuya Yara他: "Fabrication of Diamond Films at Low Pressure and Low Temperature by Magneto-Active Microwave Plasma Chemical Vapor Deposition" Jpn. J. Appl. Phys.33. 4404-4408 (1994)
Takuya Yara他: "Fabrication of Diamond Films at Low Pressure and Low Temperature by Magneto-Active Microwave Plasma Chemical Vapor Deposition" Jpn. J. Appl. Phys.33. 4404-4408 (1994)
复制标题
Takuya Yara 等人:“通过磁活性微波等离子体化学气相沉积在低压和低温下制造金刚石薄膜”J. Appl. 4404-4408 (1994)。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: