Minimizing open-loop piezoactuator nonlinearity artifacts in atomic force microscope measurements.

Minimizing open-loop piezoactuator nonlinearity artifacts in atomic force microscope measurements.
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最大限度地减少原子力显微镜测量中的开环压电致动器非线性伪影。

DOI:
10.1116/1.4994315
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发表时间:
2017
期刊:
Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B
影响因子:
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通讯作者:
Sivasankar,Sanjeevi
Sivasankar,Sanjeevi
中科院分区:
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文献类型:
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作者:
Yen,Chi-Fu;Sivasankar,Sanjeevi

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