New electrostatic dust collector for use in vacuum systems
New electrostatic dust collector for use in vacuum systems
复制标题
用于真空系统的新型静电除尘器
DOI：
10.1116/1.575888
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发表时间：
1989
期刊：
影响因子：
--
通讯作者：
H. Ishimaru
中科院分区：
文献类型：
--
作者：
H. Saeki;J. Ikeda;I. Kohzu;H. Ishimaru
研制了一种用于真空系统的新型活性除尘器。灰尘仅使用静电力或使用电子束收集。集尘电极由镀铜玻璃纤维环氧树脂制成。电极的电位可以在−3至+3 kV之间变化。电子束的电流为14 μA，测试室中的真空压力范围为10 - 6至10 - 7 Torr。在不锈钢、铝、铜、硅晶片和石英等衬底材料上，用几种尺寸在60 μm以下的导电和非导电粉尘材料对集尘装置进行了测试。使用具有摄像机的光学显微镜监测除尘。结果表明，新的主动除尘器去除90%或更多的粉尘材料从大多数基板。
A new active dust collector was developed for use in vacuum systems. The dust is collected using an electrostatic force only or using an electron beam. The dust collecting electrode is made from copper‐clad fiberglass epoxy. The potential of the electrode can be varied from −3 to +3 kV. The current of the electron beam was 14 μA, and the vacuum pressure in the test chamber ranged from 10−6 to 10−7 Torr. The dust collecting device was tested with several conducting and nonconducting dust materials ∼60 μm in size on substrate materials of stainless steel, Al, Cu, Si wafers, and quartz. Dust removal was monitored using an optical microscope with a video camera. The results show that the new active dust collector removes 90% or more of the dust materials from most substrates.