A MEMS array for pneumatic conveyor and its control based on distributed system
A MEMS array for pneumatic conveyor and its control based on distributed system
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基于分布式系统的气力输送机MEMS阵列及其控制
DOI：
10.1109/memsys.2005.1453862
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
H. Fujita
中科院分区：
文献类型：
--
作者：
Y. Fukuta;Y. Chapuis;Y. Mita;H. Fujita
本文提出了一种用于微小物体操作的气动输送机及其控制模式。输送机由560个空气喷嘴致动器的2D阵列组成，这些致动器由硅MEMS技术实现。一种分布式控制方法，基于局部气流力的应用，已经开发并成功验证。实验和表征结果，最后提出和分析。
In this paper, a pneumatic conveyor and its control mode are proposed for tiny object manipulation. The conveyor consists of a 2D array of 560 air-nozzle actuators realized by the silicon MEMS technology. A distributed control method, based on local air-flow force application, has been developed and successfully validated. Experimental and characterization results are finally presented and analyzed.