Carbon nanotube thermal probe for quantitative temperature sensing

Carbon nanotube thermal probe for quantitative temperature sensing
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DOI:
10.1016/j.sna.2013.04.038
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发表时间:
2013-09-01
影响因子:
4.6
通讯作者:
Takahashi, Koji
Takahashi, Koji
中科院分区:
工程技术3区
文献类型:
--
作者:
Hirotani, Jun;Amano, Juo;Takahashi, Koji

文献摘要

被引文献

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在纳米级的点接触的定量温度传感开发使用铂热膜传感器与碳纳米管(CNT)作为热探针。由于CNT的小尖端半径和高刚度,实现了高空间分辨率和鲁棒性。CNT探针接触点处的定量局部温度通过使探针接触和脱离接触并控制高真空环境中Pt热膜的热量来确定。使用这种方法,我们克服了CNT和样品表面之间的接触热阻(TCR)的问题。分析了传感器对碳纳米管TCR和热导率测量的灵敏度,并优化了传感器结构。(C)2013爱思唯尔有限公司版权所有。
Quantitative temperature sensing at the nanoscale point contact is developed using a platinum hot film sensor with a carbon nanotube (CNT) as a thermal probe. High spatial resolution and robustness is achieved because of the small tip radius and high stiffness of the CNT. The quantitative local temperature at the CNT probe contact point is determined by bringing the probe in and out of contact and controlling the amount of heat of the Pt hot film in high vacuum environment. Using this method, we overcome the problems of thermal contact resistance (TCR) between the CNT and sample surface. Sensor sensitivity for TCR and thermal conductivity measurement of a CNT is analyzed and the sensor configuration is optimized. (C) 2013 Elsevier B.V. All rights reserved.