Vacuum outgassing characteristics of unpigmented 3D printed polymers coated with atomic layer deposited alumina
Vacuum outgassing characteristics of unpigmented 3D printed polymers coated with atomic layer deposited alumina
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DOI：
10.1116/6.0000178
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发表时间：
2020-09-01
影响因子：
2.9
通讯作者：
Pearce, Joshua M.
中科院分区：
文献类型：
--
作者：
Bihari, Nupur;Heikkinen, Ismo T. S.;Pearce, Joshua M.
3D打印为制造空间和真空系统的定制设备提供了巨大的潜力，但为了以低成本做到这一点，聚合物是必要的。从历史上看，聚合物由于出气而不适合这些应用，但如果在聚合物表面涂上一层引入原子层沉积(ALD)的共形无机薄膜，则可以减少出气。之前关于涂覆ALD层的工作显示了大量放气的含有3D打印聚合物的炭黑的前景。在这项研究中，ALD氧化铝和一种商用真空密封胶树脂被用来涂覆透明丁二烯苯乙烯、聚碳酸酯和聚丙烯。薄膜的表征包括薄膜厚度的椭圆偏振光谱、扫描电子显微镜的微观结构分析、能量色散X射线能谱的化学分析和研究放气过程中相对变化的残余气体分析。ALD涂层样品的压力低于树脂涂层样品。结果表明，ALD涂层可以有效地接种无色3D打印塑料，可用于半导体加工系统和空间环境等污染敏感环境。
3D printing offers enormous potential for fabricating custom equipment for space and vacuum systems, but in order to do this at low costs, polymers are necessary. Historically, polymers have not been suitable for these applications because of outgassing, but if coated with a conformal, inorganic film introduced with atomic layer deposition (ALD), then outgassing can be reduced. Previous work on coating ALD layers showed promise with heavily outgassing carbon black containing 3D printed polymers. In this study, ALD aluminum oxide and a commercially available vacuum sealant resin were used to coat clear, acrylonitrile butadiene styrene, polycarbonate, and polypropylene. Characterization of the films included spectroscopic ellipsometry for thickness, microstructure analysis with scanning electron microscopy, chemical analysis with energy-dispersive x-ray spectroscopy, and residual gas analysis to study relative change in outgassing. ALD-coated samples registered lower pressures than the resin-coated ones. The results showed that the ALD coatings could effectively inoculate unpigmented 3D printed plastics, which could be used in contamination-sensitive environments such as semiconductor processing systems and space environments.