High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG lasers
High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG lasers
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DOI：
10.1117/12.352697
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发表时间：
1999-07
期刊：
影响因子：
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通讯作者：
Dirk Hellrung;L. Yeh;F. Depiereux;A. Gillner;R. Poprawe
中科院分区：
文献类型：
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作者：
Dirk Hellrung;L. Yeh;F. Depiereux;A. Gillner;R. Poprawe
陶瓷如Si 3 N4、Al 2 O3和ZrO 2以及金刚石很难用常规方法加工。短脉冲激光器，特别是三倍频，二极管泵浦的Nd：YAG激光器具有高光束质量，提供了高质量烧蚀这些材料的可能性。通过约10微米的光斑尺寸，可以实现高通量，使得材料在没有或仅具有直径>= 5微米的小孔和薄陶瓷基底的切割的情况下蒸发。边缘是尖锐的，切割的表面非常光滑。此外，可以烧蚀三维微结构。因此，激光束在表面上扫描并且材料被烧蚀脉冲，除了优化的加工参数之外，表面粗糙度可以降低到R <EQ 0.1微米。由于约0.05 μ g/脉冲的低消融速率，可以非常精确地控制单个切片的消融深度。根据材料和加工参数，深度在1至10微米的范围内。
Ceramics like Si3N4, Al2O3 and ZrO2 and also diamonds can be hardly machined by conventional methods. Short pulse lasers, especially frequency-tripled, diode pumped Nd:YAG-lasers with a high beam quality offer the possibility to ablate these materials with high quality. With a spot size of about 10 micrometers , high fluences can be achieved, so that the materials are vaporized without or with only a small holes with diameters >= 5 micrometers and cutting of thin ceramic substrates. The edges are sharp and the face of the cut is very smooth. Furthermore it is possible to ablate three dimensional microstructures. Therefore the laser beam is scanned over the surface and the materials is ablated pulse beside optimized machining parameters the surface roughness can be reduced to R <EQ 0.1 micrometers . Due to the low ablation rate of around 0.05 (mu) g/pulse the ablation depth of a single slice can be controlled very precisely. Depending on the material and the machining parameters the depth is in the range of 1 to 10 micrometers .