Low Temperature Processing of Crystalline Lead Zirconate Titanate (PZT) Film and the Direct Micropatterning by Laser-Induced Pyrolysis of a Sol-Gel-Derived Film
Low Temperature Processing of Crystalline Lead Zirconate Titanate (PZT) Film and the Direct Micropatterning by Laser-Induced Pyrolysis of a Sol-Gel-Derived Film
复制标题
结晶锆钛酸铅 (PZT) 薄膜的低温加工以及溶胶-凝胶衍生薄膜的激光诱导热解直接微图案化
DOI：
10.1143/jjap.42.l843
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发表时间：
2003
影响因子：
1.5
通讯作者：
T. Miwa
中科院分区：
文献类型：
--
作者：
A. Watanabe;Tomokazu Tanase;Yoshio Kobayashi;M. Konno;S. Yamada;T. Miwa
提出了一种新的晶态锆钛酸铅(PZT)薄膜低温制备工艺。Ar离子激光聚焦扫描在溶胶-凝胶薄膜上，诱导前驱体薄膜的热解具有空间选择性。用酸性溶液显影的薄膜得到了PZT微图形。微图案的拉曼光谱显示出PZT晶体的特征。
A novel low-temperature processing of crystalline lead zirconate titanate (PZT) film was developed. The beam from an Ar ion laser was focused and scanned on the sol-gel derived film, and it induced pyrolysis of the precursor film with spatially selectivity. Development of the film using an acidic solution gave the PZT micropattern. The Raman spectrum of the micropattern exhibited the characteristics of crystalline PZT.