Feasibility study of ultrasonic biometrics based on finger vessel imaging by epitaxial-PZT/Si piezoelectric micromachined ultrasonic transducer
Feasibility study of ultrasonic biometrics based on finger vessel imaging by epitaxial-PZT/Si piezoelectric micromachined ultrasonic transducer
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DOI：
10.1016/j.sna.2020.112145
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发表时间：
2020-09-01
影响因子：
4.6
通讯作者：
Tanaka, Shuji
中科院分区：
文献类型：
--
作者：
Liu, Ziyi;Yoshida, Shinya;Tanaka, Shuji
在这项研究中，我们证明了一个潜在的可用性的压电微机械超声换能器（pMUT）的高性能体耦合超声成像仪的基础上的外延锆钛酸铅（Epi-PZT）薄膜。作为其应用之一，提出了手指血管生物特征识别。首先，作为基础研究，对基于外延PZT（Epi-PZT）和多晶PZT（Poly-PZT）的单元件pMUT的发射能力和接收灵敏度进行了评估。实验证实，Epi-PZT是一种更高性能的pMUT的优选材料。然后，利用市售的脉冲发生器板驱动线阵，成功地形成了聚焦超声束。最后，我们证明了超声成像的聚二甲基硅氧烷为基础的幻影通过使用Epi-PZT pMUT阵列。我们认为这一成果为利用pMUT实现手指血管生物识别迈出了重要的一步。(C)2020爱思唯尔B. V.保留所有权利。
In this study, we demonstrated a potential usability of a piezoelectric micromachined ultrasonic transducer (pMUT) for a high-performance body-coupled ultrasonic imager based on an epitaxial lead zirconate titanate (Epi-PZT) thin film. A finger vessel biometrics was proposed as one of its applications. At first, transmitting abilities and receiving sensitivities of the single-element pMUT based on Epitaxial-PZT (Epi-PZT) and polycrystalline-PZT (Poly-PZT) were evaluated as a fundamental study. It was experimentally verified that the Epi-PZT was a preferable material for a higher performance pMUT. Then, the linear array driven by a commercially-available pulser board was constructed, and successfully formed a focused ultrasonic beam. Finally, we demonstrated the ultrasonic imaging of a polydimethylsiloxane-based phantom by using the Epi-PZT pMUT array. We believe this achievement is a great step to realize the finger vessel biometric by pMUT. (C) 2020 Elsevier B.V. All rights reserved.