Surface errors in the course of machining precision optics
Surface errors in the course of machining precision optics
复制标题
精密光学加工过程中的表面误差
DOI：
10.1117/12.2189991
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发表时间：
--
期刊：
影响因子：
--
通讯作者：
Rascher Rolf
中科院分区：
文献类型：
--
作者：
Biskup Heiko;Haberl Alexander;Rascher Rolf
精密光学元件通常通过研磨和抛光在几个步骤中加工，以提高精度。球面将在最后一步用大型工具完成，以使表面光滑。非球面所要求的表面精度只能通过与表面点接触的工具来实现。所谓的中频误差（MSFE）可以随着纬向过程而积累。这项工作是对形成的表面误差从研磨到抛光进行分析的表面在其加工步骤的非接触干涉方法。表面上的误差可以如DIN 4760中所述进行区分，其中第二至第三阶误差是所谓的MSFE。通过对测量数据进行适当的滤波，可以以仅在表面图中示出定义的空间频率的方式抑制误差频率。可以观察到，一些频率已经可以在早期加工步骤中形成，如研磨和主抛光。此外，已知MSFE可以由过程本身和其他副作用产生。除了描述的表面误差的测量技术的限制的基础上，不同的形成机制选择的空间频率。校正可以仅通过具有低于误差结构的波长的横向尺寸的工具来实现。所提出的考虑因素可用于制定处理表面误差的建议。
Precision optical components are usually machined by grinding and polishing in several steps with increasing accuracy. Spherical surfaces will be finished in a last step with large tools to smooth the surface. The requested surface accuracy of non-spherical surfaces only can be achieved with tools in point contact to the surface. So called mid-frequency errors (MSFE) can accumulate with zonal processes. This work is on the formation of surface errors from grinding to polishing by conducting an analysis of the surfaces in their machining steps by non-contact interferometric methods. The errors on the surface can be distinguished as described in DIN 4760 whereby 2nd to 3rd order errors are the so-called MSFE. By appropriate filtering of the measured data frequencies of errors can be suppressed in a manner that only defined spatial frequencies will be shown in the surface plot. It can be observed that some frequencies already may be formed in the early machining steps like grinding and main-polishing. Additionally it is known that MSFE can be produced by the process itself and other side effects. Beside a description of surface errors based on the limits of measurement technologies, different formation mechanisms for selected spatial frequencies are presented. A correction may be only possible by tools that have a lateral size below the wavelength of the error structure. The presented considerations may be used to develop proposals to handle surface errors.
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影响因子：
3.8
作者：
Dae Wook Kim;Sug-Whan Kim;J. Burge
通讯作者：
Dae Wook Kim;Sug-Whan Kim;J. Burge
主动流体喷射抛光工艺合适参数场的确定
DOI：
--
发表时间：
2013
期刊：
Other Conferences
影响因子：
--
作者：
R. Maurer;H. Biskup;C. Trum;R. Rascher;C. Wünsche
通讯作者：
C. Wünsche
规格：身材和光洁度不够
DOI：
--
发表时间：
2008
期刊：
Optical Engineering + Applications
影响因子：
--
作者：
Robert E. Parks
通讯作者：
Robert E. Parks
由于结构化中空间频率表面误差而导致的点扩散函数伪影理论。
影响因子：
1.9
作者：
John M. Tamkin;W. Dallas;T. Milster
通讯作者：
T. Milster