Properties and microstructure of aluminum nitride sintered by millimeter-wave heating

Properties and microstructure of aluminum nitride sintered by millimeter-wave heating
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DOI:
10.1016/j.jallcom.2004.12.103
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发表时间:
2006-02
影响因子:
6.2
通讯作者:
T. Yoshioka;Y. Makino;S. Miyake;H. Mori
T. Yoshioka;Y. Makino;S. Miyake;H. Mori
中科院分区:
材料科学2区
文献类型:
--
作者:
T. Yoshioka;Y. Makino;S. Miyake;H. Mori

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采用28 GHz毫米波加热法对添加Yb 2 O3的AlN陶瓷进行了快速烧结。结果表明,在97%T. D.在1600°C下烧结20 min,致密化温度比传统电炉法降低约300°C。在1700°C烧结40 min,即使在非还原气氛下,样品的热导率也超过180 W/(m · K)。Yb_2O_3添加剂对毫米波的有效选择性吸收是实现快速低温烧结的主要因素。
Rapid sintering of Yb2O3-added AlN was performed by applying the 28 GHz millimeter-wave heating method. It was found that full densification over 97%T.D. was attained by sintering at 1600°C for 20 min. The densification temperature was decreased by about 300°C, compared with those in the conventional method by an electric furnace. A high thermal conductivity over 180 W/(m · K) was obtained in the sample sintered at 1700°C for 40 min, even under non-reducing atmosphere. The main factor resulting in the rapid and low temperature sintering was attributed to efficient selective absorption of the millimeter-wave into Yb2O3additive.