Focused High-Energy Heavy Ion Beams
Focused High-Energy Heavy Ion Beams
复制标题
聚焦高能重离子束
DOI：
10.1143/jjap.29.1230
复制
发表时间：
1990
影响因子：
1.5
通讯作者：
F. Fujimoto
中科院分区：
文献类型：
--
作者：
Y. Horino;A. Chayahara;M. Kiuchi;K. Fujii;M. Satou;F. Fujimoto
通过将由物镜狭缝和磁四极双合透镜组成的聚焦系统与串联式加速器的束线相结合，开发了 MeV 重离子的聚焦离子束线。该系统的缩小倍率被确定为水平方向的1/3.4和垂直方向的1/14，并且实现了5.6μm×8.0μm的最小束斑尺寸。该系统允许我们进行离子束工艺，例如无掩模 MeV 离子注入和使用重离子的离子束微量分析。
A focused ion beam line of MeV heavy ions has been developed by combining a focusing system consisting of objective slits and a magnetic quadrupole doublet to the beam line of a tandem-type accelerator. The demagnification factors of this system were determined to be 1/3.4 for the horizontal direction and 1/14 for the vertical direction, and a minimum beam spot size of 5.6 µm×8.0 µm was achieved. This system allows us ion beam processes such as maskless MeV ion implantation and ion beam microanalysis using heavy ions.