Preparation of In2O3 and tin-doped In2O3 films by a novel activated reactive evaporation technique
Preparation of In2O3 and tin-doped In2O3 films by a novel activated reactive evaporation technique
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采用新型活化反应蒸发技术制备 In2O3 和锡掺杂 In2O3 薄膜
DOI:
10.1016/0040-6090(80)90204-7
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发表时间:
1980
期刊:
影响因子:
2.1
通讯作者:
R. Bunshah
中科院分区:
文献类型:
--
作者:
P. Nath;R. Bunshah