Influence of Microphone Housing on the Directional Response of Piezoelectric MEMS Microphones Inspired by Ormia Ochracea
Influence of Microphone Housing on the Directional Response of Piezoelectric MEMS Microphones Inspired by Ormia Ochracea
复制标题
DOI：
10.1109/jsen.2017.2729619
复制
发表时间：
2017-09-01
影响因子：
4.3
通讯作者：
Windmill, James F. C.
中科院分区：
文献类型：
--
作者：
Bauer, Ralf;Zhang, Yansheng;Windmill, James F. C.
介绍了定制麦克风外壳对多频带生物激励MEMS麦克风的声学方向性和频率响应的影响。这款3.2 mm x 1.7 mm的压电MEMS麦克风采用高性价比的多用户工艺制造，具有低于10 kHz的四个工作频段，所有四个频段都具有所需的一阶方向性。通过模拟和实验研究了7x7x2.5 mm（3）3-D打印定制外壳，这些外壳具有不同的麦克风膜背面声学通道，它们对声音刺激的方向性和频率响应的影响。结果表明，方向性和声学进入麦克风后腔之间存在明确的联系。此外，在该后腔声学通路中，随着高度降低，一阶方向性的方向发生变化。沿着研究了用于为所有四个频带创建相同方向性的所需配置，以及减少声学后腔通道的对称性的影响。本文强调了考虑外壳几何形状及其对生物启发定向麦克风声学行为的影响的总体要求。
The influence of custom microphone housings on the acoustic directionality and frequency response of a multiband bio-inspired MEMS microphone is presented. The 3.2 mm by 1.7 mm piezoelectric MEMS microphone, fabricated by a cost-effective multi-user process, has four frequency bands of operation below 10 kHz, with a desired first-order directionality for all four bands. 7x7x2.5 mm(3) 3-D-printed bespoke housings with varying acoustic access to the backside of the microphone membrane are investigated through simulation and experiment with respect to their influence on the directionality and frequency response to sound stimulus. Results show a clear link between directionality and acoustic access to the back cavity of the microphone. Furthermore, there was a change in direction of the first-order directionality with reduced height in this back cavity acoustic access. The required configuration for creating an identical directionality for all four frequency bands is investigated along with the influence of reducing the symmetry of the acoustic back cavity access. This paper highlights the overall requirement of considering housing geometries and their influence on acoustic behavior for bio-inspired directional microphones.