Construction of Nonlinear Dynamic MEMS Component Models Using Cosserat Theory
Construction of Nonlinear Dynamic MEMS Component Models Using Cosserat Theory
复制标题
使用 Cosserat 理论构建非线性动态 MEMS 元件模型
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
Andrew Richardson
中科院分区：
文献类型：
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作者：
C. Wang;Dongsheng Liu;R. Rosing;B. D. Masi;Andrew Richardson
This paper presents a new modelling method for MEMS components based on the Cosserat theory. By constructing Cosserat rod elements, generating symbolic code and developing numeric code in VHDL-AMS for selected demonstrators, we are able to effectively simulate and predict the essential linear and nonlinear behaviour in estimating system performance and guiding the reliability verification process. The simplicity of the Cosserat approach follows from the possibility to formulate interconnected slender components in terms of a network of quasi-rigid bodies (Cosserat elements). This modularization fits well into the behavioural modelling where a relatively low degree of freedom is needed to capture salient features of the system. Furthermore, the manner in which Cosserat elements and their interactions are formulated makes this method ideally suited for nonlinear dynamic simulations in the presence of large deflections.
