Toward nano- and microprocessing in glass with femtosecond laser pulses
Toward nano- and microprocessing in glass with femtosecond laser pulses
复制标题
利用飞秒激光脉冲对玻璃进行纳米和微加工
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
歴 渡辺
中科院分区：
文献类型：
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作者：
Kazuyoshi Ito;W. Watanabe;一良 伊東;歴 渡辺
本文报道了超短激光脉冲辐照下二氧化硅玻璃的折射率变化和空位现象。我们利用飞秒激光脉冲的成丝制作了波导、耦合器和光栅。我们展示了亚微米或纳米空缺的形成和运动，称为空洞。我们展示了在二氧化硅玻璃的后表面与水接触时形成的具有微观直径的三维形状的深孔。
In this paper, we report on the refractive index changes and vacancies that are induced in silica glass by the irradiation of ultrashort laser pulses. We fabricated waveguides, couplers, and gratings by the filamentation of femtosecond laser pulses. We demonstrate the formation and the movement of sub-micrometer or nanometer vacancies, called voids. We show the formation of three-dimensional shapes of deep holes with microscopic diameters in contact with water at the rear surface of silica glass.