Fine-tuning of whispering gallery modes in on-chip silica microdisk resonators within a full spectral range
Fine-tuning of whispering gallery modes in on-chip silica microdisk resonators within a full spectral range
复制标题
DOI：
10.1063/1.4789755
复制
发表时间：
2013-01
影响因子：
4
通讯作者：
R. Henze;Christoph Pyrlik;A. Thies;J. Ward;A. Wicht;O. Benson
中科院分区：
文献类型：
--
作者：
R. Henze;Christoph Pyrlik;A. Thies;J. Ward;A. Wicht;O. Benson
我们研究了一种有效的方法，用于微调盘式二氧化硅微谐振器中的回音壁模式谐振，以达到系统自由光谱范围内的任意频率。该方法基于后期生产氢氟酸蚀刻工艺，可精确调整此类微谐振器的半径大小。我们通过在特定氰化氢参考线（P16、P18）的 10 GHz 范围内调整其谐振频率来展示这种方法的有效性。该技术可以将窄线宽激光器或光谱线与片上二氧化硅微谐振器的高 Q 谐振进行简单而精确的匹配。
We investigate an efficient method for fine-tuning whispering gallery mode resonances in disk-type silica microresonators to reach an arbitrary frequency within the free spectral range of the system. This method is based on a post-production hydrofluoric acid etching process to precisely resize the radius of such microresonators. We show the effectiveness of this approach by tuning their resonance frequency within 10 GHz of specific hydrogen cyanide reference lines (P16, P18). This technique allows for simple and exact matching of narrow-linewidth lasers or spectroscopic lines with the high-Q resonances of on-chip silica microresonators.