Dynamical x‐ray rocking curve simulations of nonuniform InGaAs and InGaAsP using Abeles’ matrix method
Dynamical x‐ray rocking curve simulations of nonuniform InGaAs and InGaAsP using Abeles’ matrix method
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使用阿贝尔斯矩阵法模拟非均匀 InGaAs 和 InGaAsP 的动态 X 射线摇摆曲线
DOI：
10.1063/1.337311
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发表时间：
1986
影响因子：
3.2
通讯作者：
D. Berreman
中科院分区：
文献类型：
--
作者：
A. Macrander;E. Minami;D. Berreman
给出了具有梯度成分的In_1−_xGa_xAs层的本征反射功率的计算机模拟。我们发现，多个X射线峰可以由线性梯度区产生，这意味着将单个峰归因于具有恒定晶格参数的子层的解释可能并不总是正确的。我们发现，一般来说，这些模拟是不对称的，并且它们在半最大处的全宽度小于∼100角秒。我们模拟了用气相外延方法在(100)InP衬底上生长的单一In_1−_xGaxAs_1_−_yPy层的实际摇摆曲线，发现如果该层具有梯度晶格参数，则可以得到一个很好的拟合曲线。将3μm厚线性梯度层的动力学模拟与运动学模拟相比较，我们发现，分级产生的大部分特征可以用运动学理论来解释。然而，只有动力学模拟才能较好地解释S附近的反射力。
Computer simulations of the intrinsic (400) reflecting power of In1−xGaxAs layers having graded compositions are presented. We find that multiple x‐ray peaks can result from a linearly graded region which implies that an interpretation which ascribes individual peaks to sublayers having a constant lattice parameter may not always be correct. We find that, in general, the simulations are asymmetric and that they have a full width at half maximum less than ∼100 arcsec. We have simulated an actual rocking curve of a single In1−xGaxAs1−yPy layer grown on a (100) InP substrate by vapor‐phase epitaxy which exhibited multiple peaks, and we find that a good fit is possible if the layer had a graded lattice parameter. Comparing dynamical to kinematical simulations for a 3‐μm‐thick linearly graded layer, we find that most of the features resulting from the grading can be explained using kinematical theory. However, only the dynamical simulations can properly account for the reflecting power in the vicinity of the s...