Odd-harmonic repetitive control for high-speed raster scanning of piezo-actuated nanopositioning stages with hysteresis nonlinearity
Odd-harmonic repetitive control for high-speed raster scanning of piezo-actuated nanopositioning stages with hysteresis nonlinearity
复制标题
具有磁滞非线性的压电驱动纳米定位台高速光栅扫描的奇次谐波重复控制
DOI：
10.1016/j.sna.2016.04.009
复制
发表时间：
2016-06-15
影响因子：
4.6
通讯作者：
Su, Chun-Yi
中科院分区：
文献类型：
--
作者：
Li, Chun-Xia;Gu, Guo-Ying;Su, Chun-Yi
在原子力显微镜的光栅扫描应用中，精确跟踪周期性三角形轨迹是纳米定位平台的主要目标。考虑到周期性操作的事实，重复控制技术变得很有前途，最近已经发展到减少跟踪误差。在我们的新实验中，它被发现，与三角形的参考输入，滞后非线性主要影响系统在输入信号的奇次谐波。在这个意义上，奇次谐波重复控制（ORC）策略被提出来处理滞后的非线性，与奇次谐波周期性干扰处理的滞后。因此，它避免了复杂的迟滞非线性的建模和反演。所开发的ORC策略的另一个好处是，它还可以考虑由线性动态效应引起的跟踪误差。为了验证ORC策略的有效性，在定制的压电驱动纳米定位平台上进行实时实验。实验结果表明，所提出的ORC策略实现了对1562.5 Hz三角轨迹的精确跟踪，迟滞非线性被抑制到可以忽略的程度，证明了所提出的ORC策略在高速光栅扫描迟滞补偿方面的可行性和有效性。(C)© 2016 Elsevier B.V.版权所有。
In raster scanning applications of atomic force microscopies, precisely tracking periodic triangular trajectories is the major objective of nanopositioning stages. Considering the fact of periodic operations, the repetitive control technique becomes promising and has been recently developed to reduce tracking errors. In our new experiments, it is found that, with triangular reference input, the hysteresis nonlinearity mainly affects the system at the odd harmonics of the input signal. In this sense, an odd-harmonic repetitive control (ORC) strategy is proposed to handle the hysteresis nonlinearity, with the hysteresis treated as the odd-harmonic periodic disturbance. Therefore, it avoids the modeling and inverting of the complex hysteresis nonlinearity. Another benefit of the developed ORC strategy is that it can also account for the tracking errors caused by the linear dynamics effect. To verify the effectiveness of the ORC strategy, real-time experiments are performed on a custom-built piezo-actuated nanopositioning stage. Experimental results show that the developed ORC strategy achieves precise tracking of 1562.5-Hz triangular trajectory with the hysteresis nonlinearity mitigated to a negligible level, which demonstrates the feasibility and effectiveness of the developed ORC strategy on hysteresis compensation during high-speed raster scanning. (C) 2016 Elsevier B.V. All rights reserved.