Liquidly process in femtosecond laser processing
Liquidly process in femtosecond laser processing
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DOI：
10.1016/j.apsusc.2009.04.066
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发表时间：
2009-09-30
影响因子：
6.7
通讯作者：
Furusho, Hirotoshi
中科院分区：
文献类型：
--
作者：
Nakata, Yoshiki;Tsuchida, Kunio;Furusho, Hirotoshi
利用飞秒激光干涉加工技术，首次在金属薄膜上制备出了纳米级水冠状阵列结构。我们将这种结构命名为“纳米冠”。每个烧蚀洞的边缘都有隆起。脊的形状有尖峰、纳米水滴和柱状串珠。尖峰顶部的半径仅为7纳米，远小于之前工作中产生的纳米凸点的半径。液相过程中的自升导致介观纳米结构的产生，其尺寸介于纳米角或纳米管和通过机械加工或光刻加工的微米结构之间。这是自顶向下技术中的一种新的表面改性技术。(C)2009爱思唯尔有限公司版权所有。
Nano-sized water-crown like structure in array was firstly generated on metallic thin film by interfering femtosecond laser processing. We named the structure as "nanocrown''. Ridges are standing on the edge of each ablated hole. The shapes of ridges are spike, nano-waterdrop and bead on column. The radius of the top of a spike was just 7 nm, which is far smaller than that of nanobump generated in the previous work. The self-rising in liquidly process result in the generation of mesoscopic nanostructure with the size between nanohorn or nanotube and micron structures processed by machining or lithography. This is a new surface modification technique in top-down technology. (C) 2009 Elsevier B.V. All rights reserved.