Facile Fabrication of Ultraflexible Transparent Electrodes Using Embedded Copper Networks for Wearable Pressure Sensors
Facile Fabrication of Ultraflexible Transparent Electrodes Using Embedded Copper Networks for Wearable Pressure Sensors
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使用嵌入式铜网络轻松制造用于可穿戴压力传感器的超柔性透明电极
DOI：
10.1002/admt.201900823
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发表时间：
2020-01-12
影响因子：
6.8
通讯作者：
Liu, Yichun
中科院分区：
文献类型：
--
作者：
Li, Peng;Zhao, Yang;Liu, Yichun
由于电子皮肤的爆炸性需求，迫切需要压力传感器。然而，目前的连续型压力传感器需要具有复杂的多级微结构或低不透明度的电极材料。本文设计了一种嵌入聚二甲基硅氧烷（PDMS）基底中的铜网络透明电极（TE），以实现可穿戴压力传感器。通过氧等离子体处理辅助裂纹模板和电镀制备了Cu网络。氧等离子体处理提高了基板的表面附着力，这抑制了不均匀的模板开裂，并防止电镀溶液渗入模板下，从而导致光电性能的20倍品质因数提高。将Cu网络夹在PDMS层之间提供了对于这种低成本透明导电材料所报道的最佳灵活性。嵌入式Cu网络TE压力传感器能够检测1.1 Pa的压力，灵敏度为76.1 kPa（-1），超过了天然皮肤的细微压力传感特性。原位观察表明，这样的高性能源于可逆的结构变形依赖于电阻的Cu网络在反复的压力释放由于PDMS的约束作用。这项工作开辟了一种新的策略，以简单而有效的方式制造透明和灵活的压力传感器。
Pressure sensors are in urgent need due to the explosive demands in electronic skins. However, current resistive-type pressure sensors require electrode materials with complex multilevel microstructures or low opacity. Herein, a Cu network transparent electrode (TE) embedded in the polydimethylsiloxane (PDMS) substrate is designed to realize wearable pressure sensor. The Cu network is fabricated by oxygen plasma treatment-assisted crack template and electroplating. The oxygen plasma treatment improves the surface adhesion force of the substrate, which suppresses uneven template cracking and prevents the electroplating solution from seeping under the templates, thereby resulting in 20 times figure-of-merit improvement in optoelectronic performance. Sandwiching the Cu network between PDMS layers provides the best flexibility reported for such a low-cost transparent conducting material. The embedded Cu network TE-based pressure sensors are capable of detecting a pressure of 1.1 Pa with a sensitivity of 76.1 kPa(-1), surpassing the subtle pressure sensing properties of natural skin. In situ observations indicate that such a high performance originates from the reversibly structural deformation-dependent resistance of the Cu network during repeated pressing-release thanks to the constraining effect of the PDMS. This work opens a new strategy to fabricate transparent and flexible pressure sensors in a simple yet efficient matter.