Nanopositioning and fabrication using the Nano Fabrication Machine with a positioning range up to ⊘100 mm
Nanopositioning and fabrication using the Nano Fabrication Machine with a positioning range up to ⊘100 mm
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DOI：
10.1117/12.2583703
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发表时间：
2021-02
影响因子：
6.2
通讯作者：
J. Stauffenberg;C. Reuter;I. Ortlepp;M. Holz;D. Dontsov;C. Schäffel;Jens-Peter Zöllner;I. Rangelow;S. Strehle;E. Manske
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文献类型：
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作者：
J. Stauffenberg;C. Reuter;I. Ortlepp;M. Holz;D. Dontsov;C. Schäffel;Jens-Peter Zöllner;I. Rangelow;S. Strehle;E. Manske
本文介绍了一种新型的纳米加工设备100(NFM-100)及其集成的针尖系统，该系统既可用作原子力显微镜(AFM)，也可用于场发射扫描探针光刻(FESPL)。这两个系统的结合提供了在一个单一的配置中以高分辨率和精确度制造和分析微纳米结构的可能性，并且可以在一个单一的配置中在大范围内达到单个纳米的分辨率和精度，而无需更换工具或传感器。在描述了NFM-100的基本机器结构之后，将展示与NFM-100相结合的远程和大面积AFM扫描。此外，还介绍了FESPL制造工艺的基本功能。
This paper focuses on a new Nano Fabrication Machine 100 (NFM-100) with a working range up to 100 mm in diameter and its integrated tip-based system, which can be used as an Atomic Force Microscope (AFM) as well as for Field-Emission-Scanning-Probe-Lithography (FESPL). The combination of both systems offers the possibility to fabricate and analyze micro- and nanostructures with high resolution and precision down to a single nanometer over a large area in one single configuration without tool or sensor change. After the description of the basic machine structure of the NFM-100, the demonstration of long range and large area AFM scans in combination with the NFM-100 will be shown. Additionally, the basic functionality of the FESPL manufacturing process is presented.