Monitoring and diagnosis of the inductively coupled atmospheric pressure plasma jet for deterministic optical processing
Monitoring and diagnosis of the inductively coupled atmospheric pressure plasma jet for deterministic optical processing
复制标题
用于确定性光学处理的电感耦合大气压等离子体射流的监测和诊断
DOI：
10.1016/j.ijleo.2020.164815
复制
发表时间：
2020-07-01
期刊：
影响因子：
3.1
通讯作者：
Wan, Yongjian
中科院分区：
文献类型：
--
作者：
Wu, Jie;Zhang, Peng;Wan, Yongjian
电感耦合大气压等离子体加工（IC-APPP）是一种很有前途的硅基光学器件加工技术。然而，其加工效率和加工精度依赖于电感耦合等离子体（ICP）射流特性的稳定性，而射流特性的稳定性是由射流工作参数决定的。目前，射流加工参数的确定都是通过大量的加工实验来经验性地确定的，这是繁琐且昂贵的。为此，本文提出了一种实时监测与诊断系统，对射流特性进行定量测量与分析，为最佳工作参数的选择提供依据。首先，获得了ICP射流内部的温度和双原子C2的分布，并据此提出了ICP射流的形貌、硬度和激发程度的诊断指标。在此基础上，进行了射流监测和诊断实验，确定了产生高刚度、高激励度等离子体射流的最佳工作参数。最后，在确定的最佳工作参数下进行加工实验，结果表明，去除函数的稳定性和重复性得到了很好的验证。这表明，所提出的监测和诊断系统是有效的，用于快速评估ICP源，以确定产生稳定的ICP射流的最佳工作参数。
Inductively coupled atmospheric pressure plasma processing (IC-APPP) is a promising figuring technique for the optical processing of silicon-based optics. However, its processing efficiency and accuracy rely on the stability of the characteristics of inductively coupled plasma (ICP) jet, which is determined by the jet working parameters. Currently, the jet working parameters have been empirically determined by substantial processing experiments, which is tedious and costly. Therefore, in this paper, a real-time monitoring and diagnostic system for quantitatively measuring and analyzing the jet characteristics is proposed to provide a basis for the choice of optimal working parameters. Firstly, the distributions of temperature and diatomic C2within ICP jet were obtained, with which some diagnostic indices on the morphology, rigidity and excitation degree of ICP jet were proposed. Then, jet monitoring and diagnostic experiments were conducted to determine the optimal working parameters for generating the ICP jet with high rigidity and excitation degree. Finally, processing experiments under the determined optimal working parameters showed that the stability and repeatability of the removal function were well validated. It demonstrates that the proposed monitoring and diagnostic system is effective for rapid evaluation of ICP sources to determine the optimal working parameters for generating stable ICP jet.