Vapor-phase self-assembled monolayers for anti-stiction applications in MEMS
Vapor-phase self-assembled monolayers for anti-stiction applications in MEMS
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DOI：
10.1109/jmems.2007.904342
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发表时间：
2007-12-01
影响因子：
2.7
通讯作者：
Koblitz, Joern
中科院分区：
文献类型：
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作者：
Zhuang, Yan Xin;Hansen, Ole;Koblitz, Joern
我们研究了由六种不同有机硅烷前驱体在气相中生长的自组装单层 (SAM) 的抗粘连性能：CF3 (CF2)(5) (CH2)(2) SiCl3 (FOTS)、CF3 (CF2)(5) (CH2)(2) Si(OC2H5)(3) (FOTES)、CF3(CF2)(5)(CH2)(2)Si(CH3)Cl-2 (FOMDS)、CF3(CF2)(5)(CH2)(2)Si(CH3)(2)Cl (FOMMS)、CF3(CF2)(7)(CH2)(2)SiCl3 (FDTS) 和 CH3(CH2)(17)(CH2)(2)SiCl3 (OTS)。在硅基底上生长的 SAM 涂层具有静态接触角、表面能、粗糙度、纳米级粘附力、纳米级摩擦力和热稳定性等特征。使用 FDTS 作为 SAM 生长的前体实现了最佳的整体抗粘连性能，但所有涂层都显示出解决微机电系统设备中使用中的粘连问题的良好潜力。
We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3 (CF2)(5) (CH2)(2) SiCl3 (FOTS), CF3 (CF2)(5) (CH2)(2) Si(OC2H5)(3) (FOTES), CF3(CF2)(5)(CH2)(2)Si(CH3)Cl-2 (FOMDS), CF3(CF2)(5)(CH2)(2)Si(CH3)(2)Cl (FOMMS), CF3(CF2)(7)(CH2)(2)SiCl3 (FDTS), and CH3(CH2)(17)(CH2)(2)SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.