The effect of annealing at 1500 °C on migration and release of ion implanted silver in CVD silicon carbide
The effect of annealing at 1500 °C on migration and release of ion implanted silver in CVD silicon carbide
复制标题
1500℃退火对CVD碳化硅中离子注入银迁移和释放的影响
DOI:
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发表时间:
2006
期刊:
影响因子:
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通讯作者:
ME Hanson
中科院分区:
文献类型:
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作者:
Carbide HJ MacLean;RG Ballinger;LE Kolaya;SA Simonson;N. Lewis;ME Hanson