Improving the Bonding Strength of Y2O3 Coatings on Steel Substrates through a YOX Adhesion Layer
Improving the Bonding Strength of Y2O3 Coatings on Steel Substrates through a YOX Adhesion Layer
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DOI：
10.4028/www.scientific.net/msf.686.637
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发表时间：
2011-06
期刊：
影响因子：
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通讯作者：
Wei-Ling Lv;J. Liu;T. Tang;Ling Yang;Rong Lei;L. Qiao;Jiang-Li Cao
中科院分区：
文献类型：
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作者：
Wei-Ling Lv;J. Liu;T. Tang;Ling Yang;Rong Lei;L. Qiao;Jiang-Li Cao
采用反应磁控溅射法在316L不锈钢基体上制备了具有不同YOx附着层的Y2 O3/YOx复合涂层。通过射频反应磁控溅射在1.2Pa的总压下用不同的氧分压沉积YOx粘附层。采用双极脉冲反应磁控溅射法制备了Y2 O3薄膜。研究了复合涂层的显微结构、相组成、界面结合力与沉积YOx结合层所用氧分压之间的关系。利用扫描电镜和X射线衍射仪对涂层的微观结构和相组成进行了表征。用划痕仪测定了涂层的结合强度。结果表明，当氧分压为0.18 Pa时，Y2 O3/YOx复合涂层的结合强度达到最大值。
Y2O3/YOx composite coatings with different YOx adhesion layers were fabricated on 316L stainless steel substrates through reactive magnetron sputtering. The YOx adhesion layers were deposited by radio frequency reactive magnetron sputtering with different oxygen partial pressures at a total pressure of 1.2 Pa. The Y2O3 coatings were deposited by bipolar pulse reactive magnetron sputtering. The relationships between the microstructures, phase compositions, interfacial adhesion of the composite coatings and the oxygen partial pressure used for deposition of the YOx adhesion layers were investigated. The microstructures and phase compositions of the coatings were characterized by scanning electronic microscopy and X-ray diffraction. The bonding strength of the coatings was measured by scratch tester. The results showed that the bonding strength of the Y2O3/YOx composite coatings reached the maximum value when the oxygen partial pressure was 0.18 Pa.