Design of Lapping Paste in Lapping 304 Ultra-Thin Stainless Steel Sheet
Design of Lapping Paste in Lapping 304 Ultra-Thin Stainless Steel Sheet
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DOI：
10.4028/www.scientific.net/amr.1027.93
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发表时间：
2014-10
期刊：
影响因子：
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通讯作者：
S. Fan;S. Fu;J. Yao;L. Ma;J. Su
中科院分区：
文献类型：
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作者：
S. Fan;S. Fu;J. Yao;L. Ma;J. Su
超薄不锈钢板很可能是用于柔性显示器的理想基板材料。为了获得高精度、低表面粗糙度、无损伤的超薄不锈钢基片，必须采用超精密研磨和化学机械抛光技术。采用正交试验法设计了不锈钢研磨膏。根据极差分析法，确定了最佳研磨膏配方。用优化后的研磨膏对304不锈钢薄板进行了研磨试验。测试结果表明，MRR约为240 nm/min，表面粗糙度Ra约为128 nm。研究结果可为不锈钢的超精密加工提供理论支持。
Ultra-thin stainless steel sheet is likely to be the ideal substrate materials used for flexible display. In order to obtain ultra-thin stainless steel substrate with high accuracy, low surface roughness and without damage, the ultra-precision lapping and chemical mechanical polishing technology must be used. In this paper, the lapping paste for stainless steel has been designed using the orthogonal experiment method. According to the range analysis method, an optimal lapping paste had been obtained. Tests lapping the 304 stainless steel sheet with the optimal lapping paste have been done. The test results show that the MRR is about 240nm/min and the surface rough Ra is about 128 nm. This research results can provide theory support for ultra precision machining the stainless steel.