スクラッチ試験によるTiNセラミックス皮膜の破壊特性評価 : 第1報, AE振幅分布のフラクタル次元の適用
スクラッチ試験によるTiNセラミックス皮膜の破壊特性評価 : 第1報, AE振幅分布のフラクタル次元の適用
复制标题
通过划痕试验评价TiN陶瓷膜的断裂特性：第1份报告，AE振幅分布分形维数的应用
DOI：
10.1299/kikaia.65.1696
复制
发表时间：
1999
期刊：
影响因子：
--
通讯作者：
成樹 河合
中科院分区：
文献类型：
--
作者：
昇 新家;顕 米倉;正則 宅間;秀輝 吉田;成樹 河合
许多陶瓷涂层材料由于具有优良的性能而在艰苦的工作条件下使用。因此，期望建立一种用于评价这些材料的机械性能的方法来生产上级涂层材料。本文报道了在不同的N2分压下，在不同的基体材料上沉积的9种5 μm厚的TiN薄膜的划痕试验，并介绍了一种用声发射（AE）评价涂层材料性能的方法。主要内容如下：（1）研制了能检测TiN薄膜在划痕试验过程中发射的声发射信号的划痕试验装置。(2)研究了声发射信号的特征与薄膜破裂类型（裂纹、剥落和剥落）的关系。(3)由声发射幅值分布得到的分形维数m在断裂类型为裂纹时大于3，在断裂类型为碎裂时介于1 ~ 3之间，在断裂类型为剥落时小于1。从这些实验结果中发现，薄膜的强度和紧密性的评价，通过观察在划痕测试过程中的AE振幅分布的分形维数。
Many of the ceramics coating materials are in use under the hard working conditions on the ground that these materials have the excellent characteristics. Therefore, it is expected for producing the superior coating materials to establish a methodology for evaluating the mechanical properties of these materials. In this report, 9 kinds of TiN film 5 μm thick that were deposited on the different parent materials under the different N2 partial pressure were scratched and a method for evaluating the properties of the coating materials with Acoustic Emission (AE) is described. Its contents are follows : (1) The scratch testing apparatus that can detect the emitted AE signals from the TiN film during the testing was produced. (2) The relationship between the character of the detected AE signals and the fracture types of film (i.e. crack, chipping and flaking) were investigated. (3) It was became clear that the fractal dimension m led from AE amplitude distribution shows more than 3 when the fracture type is crack, the value shows between 1 and 3 when the type is chipping, the value shows less than 1 when the type is flaking. From these experimental results, it was found that the strength and the tight-adhesiveness of thin film are evaluated by observing the fractal dimensions of AE amplitude distribution during the scratch testing.