Optical metrology of a large deformable aspherical mirror using software configurable optical test system
Optical metrology of a large deformable aspherical mirror using software configurable optical test system
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DOI：
10.1117/1.oe.53.8.085106
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发表时间：
2014-08
影响因子：
1.3
通讯作者：
R. Huang;P. Su;T. Horne;G. Brusa;J. Burge
中科院分区：
文献类型：
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作者：
R. Huang;P. Su;T. Horne;G. Brusa;J. Burge
软件可配置光学测试系统（SCOTs）是一种基于反射偏折法的高效计量技术，仅使用液晶显示器和相机来测量表面斜率。表面斜率通过使用显示屏、摄像机和测试镜的坐标的三角测量来确定。我们提出我们的SCOTS测试结果集中在高动态范围测量低阶像差。用SCOTs测量了大口径双筒望远镜910 mm非球面变形次镜的变化像散，无需零校正器。SCOTs系统被设计成轴上的，在6英寸薄膜分束器的帮助下，相机和屏幕在测试镜的光轴上对准。同轴设计提供了测试中散光的更好控制。斜率的高动态范围提供了在231 μm峰谷非球面偏离的情况下0.2 μm均方根精度内的散光测量。测试的简单性允许在多个重力角度下进行测量。
The software configurable optical test system (SCOTS) is an efficient metrology technology based on reflection deflectometry that uses only a liquid-crystal display and a camera to measure surface slope. The surface slope is determined by triangulation using the co-ordinates of the display screen, camera, and test mirror. We present our SCOTS test results concentrated on high dynamic range measurements of low order aberrations. The varying astigmatism in the 910-mm diameter aspheric deformable secondary mirror for the large binocular telescope was measured with SCOTS, requiring no null corrector. The SCOTS system was designed on-axis with camera and screen aligned on the optical axis of the test mirror with the help of a 6-inch pellicle beam splitter. The on-axis design provides better control of the astigmatism in the test. The high dynamic range of the slope provided a measurement of astigmatism within 0.2-μm root-mean-square accuracy in the presence of 231-μm peak-to-valley aspheric departure. The simplicity of the test allowed the measurements to be performed at multiple gravity angles.