Impact of Al-doped ZnO layer on growth of polycrystalline Si thin films by the aluminum-induced layer exchange method

Impact of Al-doped ZnO layer on growth of polycrystalline Si thin films by the aluminum-induced layer exchange method
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Al掺杂ZnO层对铝诱导层交换法生长多晶硅薄膜的影响

DOI:
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发表时间:
2010
期刊:
影响因子:
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通讯作者:
N.Usami
N.Usami
中科院分区:
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文献类型:
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作者:
M.Jung;A.Okada;T.Saito;T.Suemasu;N.Usami

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