A study of love-wave acoustic sensors
A study of love-wave acoustic sensors
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DOI：
10.1016/s0924-4247(96)01311-8
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发表时间：
1996-09-01
影响因子：
4.6
通讯作者：
Lake, M
中科院分区：
文献类型：
--
作者：
Du, J;Harding, GL;Lake, M
洛夫模式声传感器由于其高灵敏度，在气体和液体环境中作为生物传感器非常有前途。本文介绍了一种基于SiO_2/ST切石英的Love-wave器件的实验研究，该器件在SiO_2厚度范围内具有很大的稳定性。具有高达7.3 μ m厚的SiO2引导层的器件已经通过r.f.溅射技术研究了质量灵敏度、速度、插入损耗、振荡频率稳定度和频率温度系数随层厚的变化关系。灵敏度随着层厚度的增加而增加，并且根据理论，对于40 μ m的波长，在约5.5 μ m处达到最大值。进一步增加厚度会显著降低灵敏度。在3.5和6.5 μ m之间的厚度下可以实现高灵敏度（大于或等于300 cm（2）g（-1））。Love-wave双通道延迟线振荡器还具有高频率稳定性和低噪声水平。两个频道的频率非常好地相互跟踪。
Love-mode acoustic devices are very promising as biosensors in gaseous and liquid environments because of their high sensitivity. An experimental study of Love-wave devices based on SiO2/ST-cut quartz, over a wide range of SiO2 thickness, is presented in this paper. Devices with up to 7.3 mu m thick SiO2 guiding layers have been successfully manufactured via an r.f. sputtering technique. Mass sensitivity, velocity, insertion loss, oscillation frequency stability and temperature coefficient of the frequency have been studied as a function of layer thickness. The sensitivity increases with increasing layer thickness and reaches a maximum at around 5.5 mu m, for a wavelength of 40 mu m, in accordance with theory. Further increasing the thickness decreases the sensitivity dramatically. High sensitivity (greater than or equal to 300 cm(2) g(-1)) can be achieved at thicknesses between 3.5 and 6.5 mu m. The Love-wave dual-channel delay-line oscillators also demonstrate high frequency stability and low noise levels. The frequencies of the two channels track each other extremely well.